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Category Next-generation nanoimprint lithography [Elektronische Ressource] : innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region / by Stefan Harrer
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Next-generation nanoimprint lithography [Elektronische Ressource] : innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region / by Stefan Harrer

  • 181

    pagini

  • Documente

  • 2008

Publicat de
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  • 181

    pagini

  • Documente

  • 2008

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